Olympus AL120-12 Series Bedienungsanleitung

Maintenance Manual

AL120-12 Series

300mm

Semiconductor Wafer Loader

Wafer Loader

AL120-LMB12-LP3

AL120-LMB12-F

Wafer Loader Accessory

AL120-VS12

AL120-RC

Thank you for purchasing the Olympus AL120 Series Wafer Loader.

In order to fully utilize its performance and secure safety, please read this manual before operation.

Please also keep it at hand during operation as well as for future reference.

This manual is exclusively for maintenance service engineer.

Please also keep it at hand during operation as well as for future reference.

AM5060-01

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Operation/Maintenance Manual Introduction

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i Introduction

AL120 Series Lineup

This product is an auto loader to transfer the wafer from the cassette to the microscope. The macro

observation is available while transferring wafers.

AL120 series products consist of a model name and an applicable wafer size.

Note that only the AL120 series products with the same wafer size can be combined.

(The remote controller is common to all the AL120 series products.)

AL120 series

Stage

The AL120 series consists of a wafer loader, a vacuum stage, and other products.

This manual does not cover custom-order specifications or microscopes.

To acquire a comprehensive understanding of both your loader and microscope, please refer to your

microscope operation manual.

Please prepare the cassettes and wafers at your side.

Wafer Loader

AL120-LMB12-F

AL120-LMB12-LP3

Option

Microscope

MX61L

MX63L

Vacuum Stage

AL120-VS12

Option

Remote Controller

AL120-RC

Series name

Model name

Wafer size

Cassette type

LMB

AL120-

LMB:Type of Wafer Loader

-LP3

-F

：

FOSB specification

-LP3：FOUP opener specification

Series name

Model name

Wafer size

AL120-

Introduction/Precautions Operation/Maintenance Manual

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1. Precautions

Operators must follow the instructions in the Operation/Maintenance Manual. If these instructions are not

followed, safety can not be assured, and malfunctions may occur.

The following 3 types of symbols are used in this Manual to draw operators' attention.

: Indicates a potentially hazardous situation which, if not avoided, may result in

minor or moderate injury.

: Indicates a potentially hazardous situation which, if not avoided, may result in

damage to the product or other property and/or may cause problems.

2. Safety Precautions

1. Always use the power cord provided by Olympus. If no power cord is provided

, please select the power cord by referring to the section “PROPER SELECTION

OF THE POWER SUPPLY CORD” at the end of this chapter. If the proper power cord

is not used, Olympus can no longer warrant the electrical safety performance of

the equipment. Layout the power cord at a sufficient distance from the sources of

heat such as the power supply unit/light source and lamp housing to avoid

contact with these heat sources.

2. Use the device within the scope of the specifications.

3. When you move equipment, notify Olympus distributor.

4. Always Install the product at the location where you can reach the power cord at hand

to disconnect it quickly. In case the abnormality is found with the loader, pull out the

power cord immediately from the back side of the loader.

5. Bundle cables or tubes to the table legs, etc. to prevent your legs from getting caught

in cables or tubes.

6. Be sure to connect the ground terminal of the power cord and that of the power outlet.

Otherwise, the electric safety performance intended by Olympus cannot be assured.

7. Never place a metallic object in the ventilation. This could cause an electrical shock or

malfunction.

8. Maintenance works must be done by well-trained person.

9. When it cleans a broken wafers, it is use with protection gloves etc.

10. In case the vacuum supply is stopped, a risk of dropping the wafer may be caused

during the test. It is recommended to connect the check valve or the buffer tank in

order to maintain the vacuum in case the vacuum supply is stopped. The check valve

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Operation/Maintenance Manual Introduction/Safety Precautions

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or the buffer tank is not provided with this product. If you need them, contact

Olympus.

11. Be careful, if you transfer the wafer in the down-flow status that may allow the wafer

to sway, the risk may be caused in transferring the wafer.

12. Be sure to use the cassette complied with SEMI standards. Using the distorted

cassette may cause the risk of damaging the wafer, etc.

13. To allow each microscope manifest its full performance, reserve an installation space

having the minimum dimensions described below before assembly and installation

of the microscope.

*The dimensions of the area enclosed in alternate long and two short dashes lines

indicate the stage movement range.*When maintenance is required, a larger work

space can be prepared by changing the observation tube orientation or moving

the stage.

*The following installation space is set according to the SEMI standard guidelines

(SEMI S8-1016).It is recommended that you set the optimum installation space

for each customer by referring to the following installation space data as well as

the appearance of the system, eye point height, etc.

14. FOUP opener is equipped with a power shut-off switch, located near the top edge of

the open door.

This switch is mechanically coupled with the window opening/closing system.

The switch is exposed on the upper position of the door while the window is open

,and stored in a position where it does not touch the door while the window is closed.

If the door of the FOUP opener closes while the window is open, the switch is turned off

and the power of the FOUP opener is shut off.This system prevents injuries from getting

hands caught in the door.

Introduction/Safety Precautions Operation/Maintenance Manual

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AL120-LMB12-F extermal view,eye point and center of gravity

Unit:mm

AL120-LMB12-F installation space Unit:mm

Stage movement range

installation space

Center of gravity

Eye Point

Operation/Maintenance Manual Introduction/Safety Precautions

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AL120-LMB12-LP3 extermal view,eye point and center of gravity

Unit:mm

AL120-LMB12-LP3 installation space Unit:mm

installation space

Stage movement range

Center of gravity

Eye Point

Introduction/Safety Precautions Operation/Maintenance Manual

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Earthquake Protection

Please fix the equipment to the supporting floor so as not to be moved by unexpected force such as an

earthquake using stoppers or equivalent means as per the requirements.

Quakeproof fixed parts (Option)

Material: Stainless Steel

Plate Thickness: 9mm

Fixing bolts: M10

Operation/Maintenance Manual Introduction/Safety Precautions

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Safety Symbols

The following symbols are affixed to the device. In order to safely operate this device, be sure to familiarize

yourself with the meanings of individual symbols.

Warning Indications

Warning indications are attached on the part which the special attention should be paid to the safety when

operating/using the equipment.

Follow the instructions surely.

If these symbols become dirty or peel off, contact your nearest OLYMPUS distributor for exchange and

servicing.

DANGER

MECHANICAL HAZARD

KEEP HANDS AND GARMENTS.

CLEAR OF MOVING PARTS.

CONSULT MANUAL FOR SERVICING INSTRUCTIONS.

Warning indications position:

Each arm of this device is electric drive.

The whole device movement is attention not to put a hand and a face in a device.

MECHANICAL HAZARD

Contact with moving parts causes injury by getting caught

or pinched.

Keep hands and garments away from moving parts.

Consult manual for servicing instructions.

○

This symbols indicate the presence of mechanical parts that can result in pinching,

crushing or other bodily injury.

Indicates that the main switch is ON.

Indicates that the main switch is OFF.

CAUTION

Introduction/Before Starting Operations Operation/Maintenance Manual

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3. Before Starting Operations

In order to get the best performance from the loader, as well as to ensure safety, please follow the 3

points listed below.

1. Never put your hands in the loader.

2. Do not deliberately place wafers or other objects in or remove from the loader

while it is in operation.

If excess force is applied to the wafer under inspection, it could lose its

adhesiveness and could be damaged.

3. Make sure that the main switch is turned off before removing a wafer for

unavoidable reasons such as malfunctions.

4. Maintenance and Storage

Be sure to set the main stich to

○

(OFF) and disconnect the power cord from the

back side of the loader before starting following operations.

1. Wipe each part of the loader using a soft cloth moistened with pure water.

Wipe heavy dirt or stains with a clean paper moistened with commercially

available absolute alcohol.

Never place absolute alcohol close to a flame as it is highly flammable.

Take care not to cause sparks by turning on or off an electric appliance or

fluorescent lamp.

2. Wear gloves to protect your hands while cleaning the loader when for example a

wafer is damaged.

3. Periodically check the loader for wear (a wafer loading arm and deterioration of

the drive mechanism), and replace the parts as needed. Contact your nearest

OLYMPUS distributor for repair.

1. Never disassemble the loader unnecessarily. This could affect the performance

and function of the loader.

2. Contact your nearest OLYMPUS distributor if you need MSDS.

3. Confirm and observe your local municipal ordinances or regulations when you

dispose of the loader.

If you have any questions, contact your nearest OLYMPUS distributor.

4. Lenses and solders used by this system are lead-free.

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Andere Handbücher für AL120-12 Series

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