Pfeiffer Vacuum EVI 005 MI Bedienungsanleitung

BP 5118 BEN (2010-06)

A PASSION

FOR PERFECTION

EVI 005 MI

Insert Valve, electromagnetically actuated

Operating Instructions

Product Identification

In all communications with Pfeiffer Vacuum, please specify

the information on the product nameplate. For convenient

reference copy that information into the space provided

below.

F-No:

Pfeiffer Vacuum, D-35614 Asslar

V=, W

D-35614 Asslar Berliner Strasse 43

Validity

This document applies to products with part number

PF H13 241.

The part number (No.) can be taken from the product name-

plate.

We reserve the right to make technical changes without prior

notice.

Intended Use

The insert valve is predominantly used in fast-cycling vacuum

systems, for example, for gas analysis and coating proc-

esses.

Functional Principle

The EVI 005 MI is opened by the solenoid coil and closed by

the prestressed pressure spring. It will close, or remain

closed, on power loss.

Safety

Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and en-

vironmental damage.

Caution

Information on correct handling or use. Disregard can lead

to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel

All work described in this document may only be carried

out by persons who have suitable technical training and

the necessary experience or who have been instructed by

the end-user of the product.

General Safety Instructions

•Adhere to the applicable regulations and take the neces-

sary precautions for the process media used.

Consider possible reactions between the materials

(→"Technical Data") and the process media.

Consider possible reactions of the process media due to

the heat generated by the product.

•Adhere to the applicable regulations and take the neces-

sary precautions for all work you are going to do and con-

sider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum

components are contaminated. Adhere to the relevant re-

gulations and take the necessary precautions when hand-

ling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

Pfeiffer Vacuum assumes no liability and the warranty be-

comes null and void if the end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations

etc.) on the product

•use the product with accessories not listed in the corres-

ponding product documentation.

The end-user assumes the responsibility in conjunction with

the process media used.

Failures due to contamination or wear and tear, as well as

expendable parts (e.g. seals), are not covered by the

warranty.

Technical Data

Version normally closed

Nominal diameter 5 mm

Threaded connection M20 × 1

Power specifications

Nominal voltage

Nominal power

24 VDC ±10%

10 W

Duty cycle 100% (i.e. continuous duty possible)

Degree of protection IP 65

Mounting orientation any

Switching frequency max.

Cycles to first main-

tenance

300 / min 1)

>2'000'000 2)

Tightness 1×10-9 mbar l/s

Resistance to pressure 1×10-8 mbar … 10 bar (absolute)

Operating pressure 1×10-8 mbar … 1 bar

Pressure difference Δp

In closing direction

In opening direction

Opens against a pressure

difference Δp

5 bar

1.5 bar

1 bar (with 24 VDC)

Closing time

Opening time

7 ms 1)

30 ms 1)

Temperature

Ambiance 5 °C

3) … 40 °C

Heat generation 60 °C (after 1¼ hours on con-

tinuous duty and at an ambient

temperature of 25 °C)

Bakeout 120 °C (with idle solenoid coil)

150 °C (without solenoid coil)

Materials

Bellows, connection

nut

Actuator

Seals

stainless steel 1.4301

stainless steel 1.4105

FPM

Weight 0.2 kg

1) With pressure difference Δp = 0 bar.

2) Under clean operating conditions.

If the valve is operated under harsh or dirty conditions, it

should be cleaned / maintained before the specified service

time to maintenance has been reached.

3) –15 °C, if the ambiance is free of condensable gases.

Dimensions [mm]

300 32

0.38 mm2

(AWG 22)

M20×1

Recommended flow direction

Electrical connection

Protective lid (vacuum connection)

Installation

Vacuum Connection

Caution

Caution: vacuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take ap-

propriate measures to ensure cleanliness and

prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

nPreparing the valve seat.

Without burr

(eg. R0.2)

M20×1

ø14

ø5

N6C

R0.6

6.5+0.05

≤ø5

7.5

N6C

Machining sign:

centrically machined and roughness

value ≤0.8 μm (N6)

oRemove the protective lid, hexagon nut, and solenoid

coil.

Keep the protective lid.

pRemove the protective lid from the guiding tube.

The armature and pressure spring can drop

out. Be careful when removing the protective

lid.

6.5 mm

Guiding tube

Pressure spring

Armature

The armature needs to be in an specific po-

sition to be introduced into the guiding tube or

removed there from.

Lock the armature by turning it (≈180°).

qScrew the guiding tube (with armature, pressure spring,

and O-rings) onto the prepared valve seat until the me-

chanical stop is reached.

rSlide the solenoid coil onto the guiding tube and turn it

until the power connection is in the required position,

then tighten the connection nut.

Tightening torque

≤3 Nm

sPlace the protective lid.

Power Connection

The power connection is established via the two cable

strands. Adhere to the local regulations with regard to the

installation.

Caution

Caution: switching of inductive loads (solenoid

coil)

Inductive loads may considerably reduce the

service life of or even destroy contacts.

Preferably a clamping diode should be connec-

ted in parallel to the solenoid coil. The polarity

should be chosen in such a way that the diode

blocks when normal operating voltage is avail-

able.

Clamping diode Solenoid coil

Contact

0,38 mm2

(AWG 22)

Operation

The product is ready for operation as soon as it has been

installed.

Version: Normally closed.

°C

DANGER

DANGER: hot surface

Touching the hot surface (>55 °C) can cause

burns.

Wear protective gloves.

bp5118ben

(2010-06)

Original: German BP 5118 BDE (2010-06)

Deinstallation

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health

and environment.

Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant

regulations and take the necessary precautions

when handling contaminated parts.

Caution

Caution: vacuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take ap-

propriate measures to ensure cleanliness and

prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

Preconditions:

•Vacuum system vented

•Valve cooled down to <55 °C

nDisconnect the product from the power source.

Before connecting or disconnecting the

product, turn off the control system.

oRemove the protective lid.

pRemove the hexagon nut and the solenoid coil.

qUnscrew the guiding tube.

The armature and pressure spring can drop

out. Be careful when removing the guiding

tube.

Maintenance, Repair

Under clean operating conditions the product requires no

maintenance during the rated cycle life.

Failures due to contamination or wear and tear, as

well as expendable parts (e.g. seals), are not

covered by the warranty.

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health

and environment.

Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant

regulations and take the necessary precautions

when handling contaminated parts.

Caution

Caution: vacuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take ap-

propriate measures to ensure cleanliness and

prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

Precondition: Valve deinstalled.

nDisassemble the guiding tube, armature, and pressure

spring.

Guiding tube

Pressure spring

Armature

oRemove the O-rings.

When reassembling the product: be careful to

insert the O-rings level into the grooves

without twisting them.

Guiding tube

Armature

O-ring, FPM

ø3.63×2.62 mm

O-ring, FPM

ø14×1.78 mm

ZClean the valve and replace its parts (→"Spare

Parts").

DANGER

DANGER: cleaning agents

Cleaning agents can be detrimental to

health and environment.

Adhere to the relevant regulations and

take the necessary precautions when

handling cleaning agents and disposing of

them. Consider possible reactions with the

product materials.

•Carefully clean the parts with a grease solving, non-

scouring cleaner.

•After cleaning, the parts should preferably be rinsed

with alcohol and subsequently heated to ≈50 °C in

an oven or with an industrial blower.

•Carefully clean the sealing surfaces with a lint-free

cloth moistened with alcohol. Allow them to dry.

•Wipe the seals with a lint-free cloth slightly

moistened with vacuum oil.

[Proceed in reverse order to reassemble the valve.

After reassembly, a few switching cycles should be

performed in order for the O-rings to perfectly adapt

to the sealing surfaces.

Spare Parts

When ordering spare parts, always indicate:

•All information on the product nameplate

•Description and ordering number according to the spare

parts list

Ordering number

Seal kit, comprising

5× O-ring, FPM 75, ø1.78×1.78 1)

5× O-ring, FPM 75, ø7.66×1.78 1)

5× O-ring, FPM 75, ø3.63×2.62

5× O-ring, FPM 75, ø14×1.78

PT 130 165-T

1) Not required for his valve

Ordering number

Spare parts kit, comprising

1× solenoid coil 24 VDC / 10 W 1)

1× pressure spring

1× O-ring, FPM 75, ø7.66×1.78 mm

1× O-ring, FPM 75, ø14×1.78 mm

1× O-ring, FPM 75, ø3.63×2.62 mm

BN 841 321-T

1) The included hexagonal nut is not needed

Returning the Product

WARNING

WARNING: forwarding contaminated products

Contaminated products (e.g. radioactive, toxic,

caustic or biological hazard) can be detrimental

to health and environment.

Products returned to Pfeiffer Vacuum should

preferably be free of harmful substances. Ad-

here to the forwarding regulations of all involved

countries and forwarding companies and en-

close a duly completed declaration of contami-

nation *).

*) Form under www.pfeiffer-vacuum.net

Products that are not clearly declared as "free of harmful

substances" are decontaminated at the expense of the

customer.

Products not accompanied by a duly completed declaration

of contamination are returned to the sender at his own

expense.

Disposal

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health

and environment.

Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant

regulations and take the necessary precautions

when handling contaminated parts.

WARNING

WARNING: substances detrimental to the en-

vironment

Products or parts thereof (mechanical and elec-

tric components, operating fluids etc.) can be de-

trimental to the environment.

Dispose of such substances in accordance with

the relevant local regulations.

Separating the components

After disassembling the product, separate its components

according to the following criteria:

•Contaminated components

Contaminated components (radioactive, toxic, caustic, or

biological hazard etc.) must be decontaminated in accor-

dance with the relevant national regulations, separated

according to their materials, and disposed of.

•Other components

Such components must be separated according to their

materials and recycled.

Berliner Straße 43

D–35614 Asslar

Deutschland

Tel +49 (0) 6441 802-0

Fax +49 (0) 6441 802-202

[email protected]

www.pfeiffer-vacuum.net

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