Pfeiffer Vacuum UHV 016 CU Bedienungsanleitung

BP 5275 BEN (2010-10)

A PASSION FOR PERFECTION

UHV 016 ... 063 CU

All-Metal Angle Valve, manually operated, bellows sealed, metal valve seat seal

Operating Instructions

2BP 5275 BEN (2010-10) UHV 016 ... 063 CU

In all communications with Pfeiffer Vacuum, please specify the information on the

product nameplate. For convenient reference copy that information into the space

provided below.

Typ:

No:

F-No:

Pfeiffer Vacuum, D-35614 Asslar

This document applies to products with part numbers

PF K32 032 (UVH 016 CU DN 016 CF)

PF K52 032 (UVH 040 CU DN 040 CF)

PF K62 032 (UVH 063 CU DN 063 CF)

The part number can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document apply to

valves with the nominal diameter DN 040. They apply to valves with other nominal

diameters by analogy.

We reserve the right to make technical changes without prior notice.

The product is used as shut-off valve for UHV applications. It can be baked out at

350 °C. The welded housing is suited for high-purity and toxic gases.

Product Identification

Validity

Illustrations

Technical changes

Intended Use

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 3

Contents

Product Identification 2

Validity 2

Intended Use 2

1Description 4

1.1 Overview 4

1.2 Functional Principle 4

2Safety 4

2.1 Symbols Used 4

2.2 Personnel Qualifications 5

2.3 General Safety Instructions 5

2.4 Liability and Warranty 5

3Technical Data 6

4Installation 8

4.1 Installation 8

4.1.1 Space Requirements 8

4.1.2 Flange Connection 9

5Start-Up 10

5.1 Bakeout 10

5.2 Bringing the Valve Plate Into the Defined Position 11

6Operation 12

6.1 Closing the Angle Valve 12

6.2 Opening the Angle Valve 15

7Deinstallation 16

8Maintenance 17

8.1 Bakeout 17

8.2 Replacing the Valve Plate 17

8.2.1 Deinstalling the Valve Plate 17

8.2.2 Installing a New Valve Plate 19

8.3 Adjusting the Sealing Elements 20

8.4 Adjustment Ring Setting 21

8.5 Cleaning the Angle Valve 23

8.6 Actuator 23

8.7 Leak Detection 23

9Repair 24

10 Spare Parts 24

11 Accessories 25

12 Storage 25

13 Returning the Product 25

14 Disposal 26

For cross-references within this document, the symbol (→XY) is used, for cross-

references to further documents the symbol (→[Z]).

4BP 5275 BEN (2010-10) UHV 016 ... 063 CU

1 Description

Valve plate

Valve plate base

Leak detection bore

Mark on the valve

housing

Rotary knob (enclosed)

Adjustment ring

CF flange DN 16 ... 63 CF-R

(rotatable)

Hex socket set screw

Sealing edge

Bellows

The sealing effect of the Angle valve is achieved by pressing the valve plate

against the sealing edge. The valve housing is welded.

2 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

→See page ...

1.1 Overview

1.2 Functional Principle

2.1 Symbols Used

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 5

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

•Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions between the materials (→6) and the process

media.

•Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are con-

taminated. Adhere to the relevant regulations and take the necessary precau-

tions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the

end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media

used.

Failures due to contamination or wear and tear, as well as expendable parts (e.g.

seals), are not covered by the warranty.

2.2 Personnel Qualifications

2.3 General Safety

Instructions

2.4 Liability and Warranty

6BP 5275 BEN (2010-10) UHV 016 ... 063 CU

3 Technical Data

Connection flanges, rotatable

UVH 016 CU

UVH 040 CU

UVH 063 CU

DN 16 CF-R

DN 40 CF-R

DN 63 CF-R

Installation angle any

Flow direction any

Tightness 1×10-12 mbarl/s

Pressure range

Bursting pressure

1×10-11 mbar … 4 bar

(absolute)

8 bar

Conductance 1)

UVH 016 CU

UVH 040 CU

UVH 063 CU

3 l/s

38 l/s

100 l/s

Temperatures

ambiance

operation

bakeout

(without rotary knob, closed, pressure

in vacuum system <1×10-4 mbar or

vacuum system vented with inert gas)

rotary knob

continuous

temporary

storage

Temperature increase

UVH 016 CU

UVH 040 CU

UVH 063 CU

0 °C … 55 °C

≤350 °C

≤100 °C

100 … 110 °C

+5 … +45 °C

-15 … +45 °C 2)

≤4 °C/minute

≤2 °C/minute

Closing torque

UVH 016 CU

UVH 040 CU

UVH 063 CU

2 … 10 Nm

8 … 30 Nm

30 … 60 Nm

Service life of sealing plate

(cold closing operations)

1000 cycles 3)

Lift (opening)

UVH 016 CU

UVH 040 CU

UVH 063 CU

12 mm

23 mm

33 mm

Materials

housing

spindle

spindle flange

bellows

valve plate base

valve plate

forming ring

sealing plate

rotary knob

stainless steel 1.4301

CuSn8 2.1030.26 4)

stainless steel 1.4301

stainless steel 1.4541

stainless steel 1.4301 ESU

stainless steel 1.4301

copper

PA 15% GF

Weight

UVH 016 CU

UVH 040 CU

UVH 063 CU

0.4 kg

2.0 kg

5.0 kg

1) For air with molecular flow.

2) Ambiance free of condensable gases.

3) Cycles without expandable parts (seals) and under clean operating conditions. If the

valve is operated under harsh or dirty conditions, it should be cleaned / maintained before

the specified service time to maintenance has been reached.

4) Permanent lubrication, requires no maintenance.

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 7

69.6

25.6

88.2

AF 8

ø 62

119.4

Spindle lift

DN 16 CF-R (rotatable)

107.6

34.6

Spindle lift

140

ø 62

177.5

AF 17

DN 40 CF-R (rotatable)

105

Spindle lift

210.7

ø100

267.6

AF 22

ø74

DN 63 CF-R (rotatable)

182

Dimensions [mm]

UVH 016 CU

UVH 040 CU

UVH 063 CU

8BP 5275 BEN (2010-10) UHV 016 ... 063 CU

4 Installation

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the

desorption rate.

Always wear clean, lint-free gloves and use clean tools when working

in this area.

Caution

Caution: factory adjustment

The valve is delivered

•with the adjustment ring set to the closing torque

•with the valve plate lying on the sealing edge without being

pressed against it (which ensures optimum storage).

Bear in mind that the valve is not tight in this condition. Do not loosen

the adjustment ring nor perform any opening or closing operation until

the valve is put into operation.

The protective packaging should not be removed until shortly before installation.

Even the slightest contamination could cause leaks.

Make sure the valve can be operated without any risk of bodily injury.

Spindle lift

UVH 016 CU = 15 mm

UVH 040 CU = 27 mm

UVH 063 CU = 36 mm

4.1 Installation

4.1.1 Space Requirements

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 9

Seal

Hex nut

Hex head screw

Washer

Protective lid

CF flange

Keep the protective lids.

Flange Seal Pieces Ordering number

DN 16 CF Copper

Copper, silver-plated

PF 501 401-T

PF 501 501-T

DN 40 CF Copper

Copper, silver-plated

PF 501 404-T

PF 501 504-T

DN 63 CF Copper

Copper, silver-plated

PF 501 406-T

PF 501 506-T

Flange Hex head screw Pieces Required torque

DN 16 CF M4 × 20 mm 6 per flange 4 Nm

DN 40 CF M6 × 35 mm 6 per flange 10 Nm

DN 63 CF M8 × 50 mm 8 per flange 20 Nm

4.1.2 Flange Connection

Flange seals

Screws (Accessories →25)/

Torque

10 BP 5275 BEN (2010-10) UHV 016 ... 063 CU

5 Start-Up

It is good practice to bake out new valves and valves the inner parts of which have

been exposed to atmosphere for some time, e.g. with a heating jacket.

DANGER

DANGER: hot surface

Touching the hot surface (>55 °C) can cause burns.

Do not touch the hot surface.

Caution

Caution: bakeout at atmosphere

Bakeout with the inner parts of the valve exposed to atmosphere may

lead to the formation of oxides and thus cause leaks.

Bake out the valve only if

•the pressure in the vacuum system is <1×10-4 mbar or

•the vacuum system has been vented with inert gas.

Caution

Caution: bakeout temperature >100 °C

The rotary knob may be continually exposed to temperatures <100 °C

only.

Remove the rotary knob before baking out the valve.

Heating sleeve 1)

Temperature increase:

DN 016 ≤4 °C/minute

DN 040 ≤4 °C/minute

DN 063 ≤2 °C/minute

Maximum bakeout temperature: 350 °C

p < 10-4 mbar or

vacuum system vented with inert gas

p < 10-4 mbar or

vacuum system vented with inert gas

1) Not enclosed in scope of delivery.

5.1 Bakeout

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