Pfeiffer Vacuum EVB Series Bedienungsanleitung

BP 5239 BEN (2010-10)

A PASSION FOR PERFECTION

EVB 063 … 160 PA/PX

Angle Valve, pneumatically actuated, bellows sealed, with position indicator, without pilot

valve

Operating Instructions

2BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX

In all communications with Pfeiffer Vacuum, please specify the information on the

product nameplate. For convenient reference copy that information into the space

provided below.

Typ:

No:

F-No:

Pfeiffer Vacuum, D - 35614 Asslar

This document applies to products with the following part numbers:

PF B16 002 (DN 63 ISO-K)

PF B26 002 (DN 100 ISO-K)

PF B36 002 (DN 160 ISO-K)

PF B16 032 (DN 63 ISO-K)

PF B26 032 (DN 100 ISO-K)

The part number (No) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document

correspond to Angle Valves with the vacuum connection DN 100 ISO-K. They

apply to Angle Valves with the vacuum connections DN 63 ISO–K and

DN 160 ISO–K by analogy.

We reserve the right to make technical changes without prior notice.

If not indicated otherwise, the dimensions are given in mm.

The angle valves are used as shut-off and venting devices for vacuum systems.

Product Identification

Validity

Aluminum housing

Stainless steel housing

Intended Use

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 3

Contents

Product Identification 2

Validity 2

Intended Use 2

1Description 4

1.1 Over View 4

1.2 Functional Principle 4

2Safety 5

2.1 Symbols Used 5

2.2 Personnel Qualifications 5

2.3 General Safety Instructions 5

2.4 Liability and Warranty 5

3Technical Data 6

4Installation 8

4.1 Vacuum Connections 8

4.2 Compressed Air Connection 9

4.3 Electrical Connection 11

5Operation 12

6Deinstallation 13

6.1 Electrical Connection 13

6.2 Compressed Air Connection 13

6.3 Vacuum Connection 15

7Maintenance / Repair 16

7.1 Removing the Cover 17

7.2 Minor Maintenance 18

7.3 Major Maintenance 26

7.4 Installing the Cover 45

7.5 Functional Check 46

7.5.1 Leak Detection at the Bellows 46

8Spare Parts 47

9Returning the Product 49

10 Disposal 49

For cross-references within this document, the symbol (→XY) is used.

4BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX

1 Description

Leak detection opening

(below the collar seal)

Connector (enclosed)

Vacuum connection

DN 63…160 ISO–K

Visual position indicator

Compressed air inlet

The Angle Valve opens when compressed air is admitted. The visual position

indicator becomes visible, and the electrical position indicator "valve open" is

activated.

Position indicator

"valve open" activated

Pilot valve

activated

Compressed

air connection

Valve open

Visual position indicator

visible

Compressed air

supply

When no compressed air is admitted, the Angle Valve is closed by a pressure

spring. The visual position indicator is no longer visible, and the electrical position

indicator "valve closed" is activated.

Position indicator

"valve closed" activated

Pilot valve

deactivated

Valve closed

Visual position indicator

not visible

Pressure spring

Compressed

air connection

1.1 Over View

1.2 Functional Principle

Opening

Closing

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 5

2 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

•Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions between the materials (→6) and the process

media.

•Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are con-

taminated. Adhere to the relevant regulations and take the necessary precau-

tions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if

end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories and options not listed in the corresponding

product documentation.

The end-user assumes the responsibility in conjunction with the process media

used.

Failures due to contamination or wear and tear, as well as expendable parts (e.g.

seals), are not covered by the warranty.

2.1 Symbols Used

2.2 Personnel Qualifications

2.3 General Safety

Instructions

2.4 Liability and Warranty

6BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX

3 Technical Data

Type of connection

Rating soldered joints

250 VAC / 30 VA / 0.125 A

50 VDC / 12.5 W / 0.25 A

Connection flange DN 63

ISO-K DN 100

ISO-K DN 160

ISO-K

Actuation opening: pneumatic

closing: by pressure spring

Tube connection

Pressure range

Purity classes

ø6 mm, ø¼“

4 … 8 bar overpressure

2 4 1 (ISO 8573-1)

Piston displacement 75 cm3195 cm3570 cm3

Stroke of the valve plate 20 mm 25 mm 35 mm

Conductance 1) 140 l/s 330 l/s 800 l/s

Switching frequency 2)

Opening time 2)

Closing time 2)

60 / min

300 ms

700 ms

60 / min

400 ms

700 ms

40 / min

500 ms

700 ms

Cycle life 3) 1.5 million

Tightness 1×10-9mbar l/s (He)

Pressure range 1×10-8mbar … 1.5 bar (absolute)

Resistance to pressure 4 bar (absolute)

In closing direction

In opening direction

Opens to a pressure

difference Δp 4)

1.5 bar

Ambiance

Bakeout

Aluminum housing

Stainless steel housing

Actuator

5 … 60 °C

80 °C

150 °C

60 °C

Degree of protection

Protection class IP 54

Mounting orientation 5) any

Housing

PF B16 002, PF B26 002,

PF B36 002

PF B16 032, PF B26 032

Bellows / valve plate

Pressure spring

Seals

Cover

Cylinder unit

Protective lids

Packing

3.2373.62

1.4305

1.4541 / 14301

1.1200

FPM

styrene-butadiene

3.2371.61

carton box, PE, PU

PF B16 002, PF B26 002,

PF B36 002

PF B16 032, PF B26 032

4 kg

6.8 kg

6.7 kg

11.7 kg

11.4 kg

–

1) For air with molecular flow.

2) Pressure difference Δp = 0, and compressed air = 6 bar (overpressure).

3) Cycles under clean operating conditions and with recommended mounting orientation.

If the valve is operated under harsh or dirty conditions, it should be cleaned / maintained

before the specified service time to maintenance has been reached.

4) Compressed air = 4 bar (overpressure).

5) Recommended mounting orientation: valve seat toward vacuum chamber.

Position indicator

Vacuum connection

Compressed air supply

Pressure difference Δp

Temperatures

Materials

Weight

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 7

DN 63 ISO-K

DN 100 ISO-K

DN 160 ISO-K

264

295

380

175

200

267

140

160

186

124

164

215

108

138

Protective lid

Compressed air inlet

Electrical connection for

position indicator

Visual position indicator

Valve seat site

Leak detection opening

(below the collar seal)

Dimensions [mm]

8BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX

4 Installation

DANGER

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process

gases can result if clamps are opened while the vacuum system is

pressurized.

Do not open any clamps while the vacuum system is pressurized. Use

the type of clamps which are suited to overpressure.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the

desorption rate.

Always wear clean, lint-free gloves and use clean tools when working

in this area.

Remove the protective lids and install the valve to the vacuum system by means of

the clamp flange fittings.

Centering ring

with O-ring

4 clamps

(for all nominal

diameters)

ISO-K connection-

flange

Protective lid

Keep the protective lids.

4.1 Vacuum Connections

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 9

DANGER

DANGER: compressed air

Unprofessionally handling compressed air can cause physical injury.

Adhere to the relevant regulations and take the necessary precautions

when handling compressed air.

DANGER

DANGER: movement of the valve plate

When the valve is in operation, the valve plate can catch parts of the

body and thus cause injuries.

Take appropriate measures (e.g. protective grid) to prevent access to

the inside of the installed valve.

The plastic tube must meet the following specifications:

•OD 6 mm

•bursting pressure ≥10 bar overpressure

•material: PA soft or PU

To ensure leak tightness of the instant push-in fitting

•cut the plastic tube perpendicularly

•make sure the outside of the plastic tube is not damaged

The compressed air must meet the following specifications:

•purity classes 2 4 1 (ISO 8573-1)

•4 … 8 bar overpressure

4.2 Compressed Air

Connection

10 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX

Push the tube into the instant push-in fitting until the mechanical stop is reached.

Check that it is correctly mounted by slightly pulling.

Instant push-in fitting

Plastic tube OD 6 mm

Connecting the plastic tube

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