Agilent Technologies HS-16 Bedienungsanleitung

HS-16 - HS-20 - HS-32 - NHS-35

High Throughput Diffusion Pumps

User Manual

2 High Throughput Diffusion Pumps User Manual

Notices

Manual Part Number

699901140

Edition G.00, April 2021

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Agilent Technologies LDA Malaysia

Sdn Bhd Bayan Lepas

Free Industrial Zone 11900 Bayan Lepas,

Penang Malaysia

Printed in Italy

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

warranties of merchantability and

fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

connection with the furnishing, use, or

performance of this document or of

any information contained herein.

Should Agilent and the user have a

separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance with

the terms of such license.

Restricted Rights Legend

U.S. Government Restricted Rights.

Software and technical data rights

granted to the federal government

include only those rights customarily

provided to end user customers.

Agilent provides this customary

commercial license in Software and

technical data pursuant to FAR 12.211

(Technical Data) and 12.212

(Computer Software) and, for the

Department of Defense, DFARS

252.227-7015 (Technical Data -

Commercial Items) and DFARS

227.7202-3 (Rights in Commercial

Computer Software or Computer

Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

High Throughput Diffusion Pumps User Manual 3

Contents

About this manual 9

Validity 9

Definitions and terminology 10

Definition of Caution, Warning and Note 10

Warning Symbols 11

Safety 13

Proper use 13

Improper use 14

Disposal 15

Service 16

Diffusion Pump Hazards 17

Explosion 18

Pressurization Hazards 20

Dangerous Substances 21

High Temperatures 22

High Voltages 22

Large Equipment and Heavy Weights 22

Diffusion Pump Description 23

Pump Operation 24

Technical Specifications 24

Pump Air Speed and Throughput 27

Physical Specifications 29

Contents

4 High Throughput Diffusion Pumps User Manual

Unpacking 33

Setup 33

Assembly 33

Cleaning a New Pump 34

Cleaning Safety 34

Disassembly for Initial Cleaning 35

Reassembly After Initial Cleaning 35

System and Utility Connections 36

Vacuum Connections 36

Cooling Water 37

Quick Cool Coil Connection 38

Obtaining High Vacuum on the NHS-35 39

Electrical Connections 39

Overheating: Detection by Thermal Switches

Initial Vacuum Test 53

Adding or Changing Pump Fluid 54

Information on Fluid and DP Performance 54

Operation 56

Startup Procedure 57

Humid Environments 57

Shutdown Procedure 58

Maintenance 59

Periodic Inspections 59

Cleaning 60

Cleaning Safety 60

Contents

High Throughput Diffusion Pumps User Manual 5

Disassembly and Reassembly Procedures 62

Cold Cap 62

Jet Assemblies 64

HS-16 Jet Assembly 64

HS-20 Jet Assembly 66

HS-32 Jet Assembly 69

NHS-35 Jet Assembly 71

Heater Replacement Procedure 73

Troubleshooting 76

Leakage 76

Outgassing 76

Poor Pump or System Performance 77

Accessories and Spare Parts 79

Contents

6 High Throughput Diffusion Pumps User Manual

Technical Information

High Throughput Diffusion Pumps User Manual 7

1Technical Information

About this manual 9

Validity 9

Definitions and terminology 10

Definition of Caution, Warning and Note 10

Warning Symbols 11

Safety 13

Proper use 13

Improper use 14

Disposal 15

Service 16

Diffusion Pump Hazards 17

Explosion 18

Description of the High Throughput Diffusion Pumps 23

Pump Operation 24

Pump Air Speed and Throughput 27

Physical Specifications 29

Unpacking 33

Setup 33

Assembly 33

Cleaning a New Pump 34

Cleaning Safety 34

Disassembly for Initial Cleaning 35

Reassembly After Initial Cleaning 35

System and Utility Connections 36

Vacuum Connections 36

Cooling Water 37

Quick Cool Coil Connection 38

Obtaining High Vacuum on the NHS-35 39

Technical Information

8 High Throughput Diffusion Pumps User Manual

Electrical Connections 39

Overheating: Detection by Thermal Switches

Initial Vacuum Test 53

Adding or Changing Pump Fluid 54

Operation 56

Startup Procedure 57

Humid Environments 57

Shutdown Procedure 58

Maintenance 59

Periodic Inspections 59

Cleaning 60

Cleaning Safety 60

Disassembly and Reassembly Procedures 62

Cold Cap 62

Jet Assemblies 64

Heater Replacement Procedure 73

Troubleshooting 76

Leakage 76

Outgassing 76

Poor Pump or System Performance 77

Accessories and Spare Parts 79

Technical Information

High Throughput Diffusion Pumps User Manual 9

About this manual

Validity

This manual lists the instructions for the users of the High Throughput Diffusion

Pumps, with particular reference to the notions relating to safety, operation and first

level maintenance, limited to maintenance operations for which the user is

responsible.

The maintenance operations, illustrated in the specific sections, with specific

provisions relating to the higher level of maintenance (personnel specifically trained

for maintenance operations) must not be carried out by the user.

NOTE

1This manual contains useful information so that all personnel using the

High Throughput Diffusion Pumps can operate it safely and guarantee perfect

efficiency, for its entire life span.

2Keep this manual, together with all the related publications, in an accessible

place known to all operators/maintenance personnel.

Technical Information

10 High Throughput Diffusion Pumps User Manual

Definitions and terminology

Definition of Caution, Warning and Note

Some important references of this manual are highlighted and framed in

contrasting color.

WARNING

Warning messages draw the operator's attention to a specific procedure or

practice which, if not performed correctly, could result in serious personal

injury.

CAUTION

Caution messages are displayed before procedures which, if not observed, could

cause damage to the equipment.

NOTE

Notes are intended to call attention to important information and provide more

detail regarding specific steps.

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