Pfeiffer Vacuum PM Z01 310 Bedienungsanleitung

OPERATING INSTRUCTIONS

Translation of the Original

SEALING GAS VALVE

Dear customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new Pfeiffer Vacuum accessory

should support you in your individual application with full performance and without

malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/16

Table of contents

1 About this manual 4

1.1 Validity 4

1.2 Variants 4

1.3 Target group 4

1.4 Conventions 4

1.4.1 Instructions in the text 4

1.4.2 Abbreviations 4

2 Safety 6

2.1 General safety information 6

2.2 Proper use 6

2.3 Foreseeable misuse 6

3 Product description 7

3.1 Shipment 7

3.2 Functional description 7

4 Installation 8

5 Accessories 11

6 Technical data and dimensions 12

6.1 Technical data 12

6.2 Dimensions 13

Declaration of conformity 14

Table of contents

3/16

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.2 Variants

Part number Selection field

PM Z01 310 Sealing gas valve, shielded for HiPace 30/60/80 with TC 110

PM Z01 311 Sealing gas valve, shielded for HiPace 300 with TC 110/120

PM Z01 312 Sealing gas valve, shielded for HiPace 300 with TC 400 and TM 700, TCP 350

PM Z01 313 Sealing gas valve, shielded for HiPace 400/700/800 P Version with TC 400 and Hi-

Pace 1200–2300 with TC 1200

PM Z01 314 Sealing gas valve, shielded for HiPace 1200–2300 with TC 1200

PM Z01 322 Sealing gas valve, shielded for HiPace 1200–2800 with TC 1200

Tbl. 1: Sealing gas valve versions

1.3 Target group

This operating instructions is intended for persons who

●install,

●operate.

The work described in this document may be carried out only by people who have completed suitable

technical training (experts), or who have received equivalent training from Pfeiffer Vacuum.

1.4 Conventions

1.4.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.4.2 Abbreviations

DN Nominal diameter as size description

ISO Flange: Connector in accordance with ISO 1609 and ISO 2861

About this manual

4/16

LED Illuminating diode

M8 Connector assembly with M8 thread

M12 Connector assembly with M12 thread

TC Turbopump electronic drive unit (turbo controller)

TCP External electronic drive unit for the turbopump (turbo controller) with current supply

TM Drive and magnetic bearing controller of the Turbopump

WAF width across flats

Tbl. 2: Abbreviations used in this document

About this manual

5/16

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Proper use

►Use the sealing gas valve only for controllable inlet of inert gases to Pfeiffer Vacuum turbopumps

designated for this purpose.

►Use the sealing gas valve to protect against penetration by corrosive media.

2.3 Foreseeable misuse

Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the

purpose of the product, whether intentional or unintentional, is regarded as improper use, in particular:

●Connection to pumps or equipment which are not suitable for this purpose according to their oper-

ating instructions

●Connection to equipment with exposed live parts

Safety

6/16

3 Product description

3.1 Shipment

The shipment includes the following parts:

●Sealing gas valve

●1 Sealing ring

●Filter

●Operating instructions

3.2 Functional description

The use of sealing gas serves to protect the vacuum pump in dusty processes or with excessive gas

throughputs. Sealing gas prevents the ingress of damaging substances into the motor and bearing area.

The Pfeiffer Vacuum sealing gas valve supplies a vacuum pump with a suitable, constant flow rate with

electric control.

Fig. 1: Overview of Pfeiffer Vacuum sealing gas valve

1 Connection plug M8 8 Valve seat

2 LED control lamp 9 Solenoid valve

3 Control cable 10 Filter housing with capillaries

4 Connection plug M12 11 Gas outlet

5 Filter (included in shipment) 12 Protective plug

6 Screw plug 13 Sealing ring

7 Gas inlet side adapter 14 Power supply plug

Product description

7/16

4 Installation

NOTICE

Property damage caused by unfiltered media supply

Using unfiltered media for the gas inlet of a vacuum pump may result in particle contamination. There

is a risk of damage to, and even destruction of, vacuum components.

►Install suitable filters from the Pfeiffer Vacuum accessories range upstream of the gas inlet, be-

fore you use ambient air or other unclean media.

Usage recommendation

●Pfeiffer Vacuum recommends the use of sealing gas at 50 % of the maximum vacuum

pump gas throughput or higher.

●The permissible inlet pressure for sealing gas is 1,500 hPa absolute.

1 2 3

4 5

Fig. 2: Example: Connecting M8 sealing gas valve to TC 110, TC 120 electronic drive units

1 Locking screw 7 Multifunction connection

2 Sealing ring 8 Electronic drive unit

3 Sealing gas connection 9 Protective plug

4 Turbopump 10 Sealing gas valve

5 Connection cable with accessory connection 11 Screw plug

6 Control line

Installation

8/16

1 2 3

4 5 6

78910

Fig. 3: Example: Connecting M12 sealing gas valve to TCP 350, TC 400 and TM 700 electron-

ic drive units

1 Accessory connection 6 Screw plug

2 Turbopump 7 Locking screw

3 Control line 8 Sealing ring

4 Protective plug 9 Sealing gas connection

5 Sealing gas valve 10 Electronic drive unit

1 2 3

Fig. 4: Example: Connecting M12 sealing gas valve to TC 1200, TCP 1200 electronic drive

units

1 Turbopump 6 Sealing gas valve

2 Sealing gas connection 7 Protective plug

3 Sealing ring 8 Control line

4 Locking screw 9 Accessory connection

5 Screw plug 10 Electronic drive unit

Required tools

●Hexagon wrench, SW 17 mm

●Calibrated torque wrench (tightening factor ≤ 1.6)

Install sealing gas valve

1. Unscrew the screw plug with sealing ring out of the sealing gas connection of the turbopump.

2. Screw the sealing gas valve, with sealing ring on the outlet side, into the sealing gas connection of

the turbopump.

–Tightening torque: 5 Nm.

Installation

9/16

Connecting the sealing gas valve

The electrical connection of the sealing gas valve is dependent on the turbopump electronic drive unit,

and its connection variants.

►Configure the accessory output for the sealing gas via the interfaces of your electronic drive unit.

►TC 110, TC 120, TCP 350, TCP 1200: Connect the control cable connecting plug to the electronic

drive unit using a suitable connection cable or adapter.

►TC 400, TM 700, TC 1200: Connect the control cable connecting plug directly to the correspond-

ing electronic drive unit accessory connection.

Establishing the sealing gas supply

1. Screw the filter (included in shipment) onto the valve inlet side by hand, if you wish to use dry am-

bient air as sealing gas.

2. Alternatively: Connect an inert gas supply (e.g., nitrogen) to the inlet side.

3. If required, use a connection adapter from the Pfeiffer Vacuum accessories range (not included in

shipment).

Installation

10/16

Dieses Handbuch passt für folgende Modelle

Inhaltsverzeichnis

Andere Pfeiffer Vacuum Steuereinheit Handbücher

Pfeiffer Vacuum

Pfeiffer Vacuum DualGauge TPG 262 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TC 110 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB 016 S A/X Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum OmniControl Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum UDV 040 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 366 MAXIGAUGE Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum PM Z01 295 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TVV 001 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum PM Z01 290 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVA 016S Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 361 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVC 116 M Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum HISCROLL Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 300 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB 016 Series Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum HIPACE NEO Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum AVA 016 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 366 MAXIGAUGE Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVI 005 MI Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum DCU 002 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum UVH 016 VI Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum HPU 001 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TCP 350 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum UVH 016 VI Bedienungsanleitung

Beliebte Steuereinheit Handbücher anderer Marken

Festo

Festo Compact Performance CP-FB6-E Stücklistenhandbuch

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Bedienungsanleitung

JS Automation

JS Automation MPC3034A Bedienungsanleitung

JAUDT

JAUDT SW GII 6406 Series Kurzanleitung

Spektrum

Spektrum Air Module System Bedienungsanleitung

BOC Edwards

BOC Edwards Q Series Bedienungsanleitung

KHADAS

KHADAS BT Magic Bedienungsanleitung

Etherma

Etherma eNEXHO-IL Bedienungsanleitung

PMFoundations

PMFoundations Attenuverter Bedienungsanleitung

GEA

GEA VARIVENT Bedienungsanleitung

Walther Systemtechnik

Walther Systemtechnik VMS-05 Bedienungsanleitung

Altronix

Altronix LINQ8PD Montageanleitung

Eaton

Eaton Powerware Series Bedienungsanleitung

WAGO

WAGO 750-407/040-000 Bedienungsanleitung

Sony

Sony CCU-590 Bedienungsanleitung

Graco

Graco 25D614 Bedienungsanleitung

Task Force Tips

Task Force Tips YE-RF-900 Programmierhandbuch

Shini

Shini SPV-U Series Bedienungsanleitung