Pfeiffer Vacuum TPG 300 Bedienungsanleitung

OPERATING INSTRUCTIONS

Translation of the Original

PLUG-IN BOARDS

for total pressure measuring and control units TPG 300/TPG 500

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new total pressure measuring and

control unit should support you in your individual application with full performance and without

malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. From this

extensive, practical experience we have gained a large volume of information that can

contribute to efficient deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/48

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 8

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Abbreviations 8

1.4 Trademark proof 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 11

2.4 Proper use 11

2.5 Foreseeable improper use 11

2.6 Responsibilities and warranty 12

2.7 Owner requirements 12

2.8 Personnel qualification 12

2.8.1 Ensuring personnel qualification 12

2.8.2 Personnel qualification for maintenance and repair 13

2.8.3 Advanced training with Pfeiffer Vacuum 13

2.9 Operator requirements 13

3 Product description 14

3.1 Function 14

3.1.1 Pirani measuring system 14

3.1.2 Cold cathode measuring system 14

3.2 Identifying the product 14

3.3 Structure of the plug-in boards 14

3.4 Interfaces 15

3.4.1 "OUTPUT" connection on PI 300 and CP 300 15

3.4.2 "CONTROL" connection on PE 300DC9 15

3.4.3 "RELAY" connection on IF 300A/C/P 16

3.4.4 "RELAY" connection on IF 300B 16

3.4.5 "RS-232" connection on IF 300A 17

3.4.6 "RS-232" connection on IF 300B 17

3.4.7 "RS-422" connection on IF 300C 18

3.4.8 "Profibus" connection on IF 300P 18

3.5 Scope of delivery 19

4 Transport and storage 20

4.1 Transporting the product 20

4.2 Storing the product 20

5 Installation 21

5.1 Installing/removing plug-in boards 21

5.2 Connecting gauges 21

5.2.1 Connecting Pirani gauges 21

5.2.2 Connecting the cold cathode gauge 22

5.3 Connecting interfaces and connections 23

5.3.1 Connecting the analog signal to the measurement boards 23

5.3.2 Connecting relays to the interface boards 23

5.3.3 Connecting the "RS-232-C" interface of the IF 300A 24

5.3.4 Connecting the "RS-232-C" interface of the IF 300B 24

Table of contents

3/48

5.3.5 Connecting the "RS-422" interface of the IF 300C 24

5.3.6 Connecting the "Profibus-DP" interface on the IF 300P 25

6 Calibrating the Pirani measuring circuit 26

7 Malfunctions 27

8 Shipping 29

9 Recycling and disposal 30

9.1 General disposal information 30

9.2 Disposing of plug-in boards 30

10 Service solutions by Pfeiffer Vacuum 31

11 Accessories 33

11.1 Accessory information 33

11.2 Ordering accessories 33

12 Technical data and dimensions 37

12.1 Technical data 37

12.2 Dimensions 41

13 Appendix 43

13.1 Relation: measuring signal and pressure 43

13.2 Gas type dependence 44

13.3 Units of pressure 46

13.4 Gas throughputs 46

Table of contents

4/48

List of tables

Tbl. 1: Applicable documents 7

Tbl. 2: Variants 7

Tbl. 3: Abbreviations used 9

Tbl. 4: Switch functions on IF 300A/C/P 16

Tbl. 5: Switching functions on IF 300B 17

Tbl. 6: Disturbances during installation 27

Tbl. 7: Interference during operation and calibration 27

Tbl. 8: Disturbances as a result of defects 27

Tbl. 9: Disturbances with the RS-232-C interface 28

Tbl. 10: Disturbances with the RS-422 interface 28

Tbl. 11: Disturbances with the Profibus-DP interface 28

Tbl. 12: Pirani gauges 33

Tbl. 13: Cold cathode gauges 34

Tbl. 14: Measuring cable for TPR 010 34

Tbl. 15: Measuring cable for TPR 017 and TPR 018 35

Tbl. 16: Extension cable for TPR 010, TPR 017 and TPR 018 35

Tbl. 17: Measuring cable for IKR 050 and IKR 060 35

Tbl. 18: Measuring cable for IKR 070 36

Tbl. 19: Plugs and interface cable 36

Tbl. 20: Dummy plates 36

Tbl. 21: Technical data PI 300D / PI 300DN 37

Tbl. 22: Technical data PE 300DC9 37

Tbl. 23: Technical data CP 300C9/C10/T11/T11L 39

Tbl. 24: Technical data IF 300A 39

Tbl. 25: Technical data IF 300B 40

Tbl. 26: Technical data IF 300C 40

Tbl. 27: Technical data IF 300P 41

Tbl. 28: Units of pressure and their conversion 46

Tbl. 29: Gas throughputs and their conversion 46

List of tables

5/48

List of figures

Fig. 1: "OUTPUT" connection with 2 sockets 15

Fig. 2: "CONTROL" connection on PE 300DC9 15

Fig. 3: Switch and logic on the "CONTROL" connection 15

Fig. 4: "RELAY" connection on IF 300A/C/P 16

Fig. 5: "RELAY" connection on IF 300B 16

Fig. 6: "RS-232" connection on IF 300A 17

Fig. 7: "RS-232" connection on IF 300B 17

Fig. 8: "RS-422" connection on IF 300C 18

Fig. 9: "Profibus" connection on IF 300P 19

Fig. 10: Coax cable and triax cable 22

Fig. 11: Locking the triax plug 23

Fig. 12: Folding ferrite for IF 300B 23

Fig. 13: Connecting the interface cable to IF 300B 24

Fig. 14: ATM and HIGH VAC trimming potentiometers 26

Fig. 15: Pirani measuring cable connection diagram 34

Fig. 16: Pirani extension cable connection diagram 34

Fig. 17: Dimensions of measurement boards 41

Fig. 18: Dimensions of interface and relay boards 42

Fig. 19: Relation: Measuring signal and pressure with TPR gauges 43

Fig. 20: Relation: Measuring signal and pressure with IKR gauges 44

Fig. 21: Displayed pressure for TPR gauges 45

Fig. 22: Displayed pressure for IKR gauges 45

List of figures

6/48

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This document describes the function of the products listed in the following and provides the most im-

portant information for safe use. The description is written in accordance with the valid directives. The

information in this document refers to the current development status of the products. The document

retains its validity assuming that the customer does not make any changes to the product.

1.1.1 Applicable documents

Designation Document

Operating instructions "Total pressure measuring and control unit"

TPG 300

BG 5970

Operating instructions "Total pressure measuring and control unit"

TPG 500

BG 6008

Communication protocol "Total pressure measuring and control unit"

TPG 300

BG 5973

Communication protocol "Total pressure measuring and control unit"

TPG 500

BG 6009

“Gauges” operating instructions

ModulLine gauges

(depending on the gauge

used)

Tbl. 1: Applicable documents

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

This document applies to the products with the following part numbers:

Part number Type Designation

PT 546 920-T Measurement board (Pirani) PI 300D

PT 549 214-T PI 300DN

PT 441 375-T Measurement board (cold cathode) PE 300DC9

PT 441 000-T Measurement board (Pirani/cold cathode) CP 300C9

PT 441 114-T CP 300C10

PT 441 080-T CP 300T11

PT 441 120-T CP 300T11L

PT 441 130-T Interface and relay board (RS-232-C) IF 300A

PT 441 250-T IF 300B

PT 441 390-T Interface and relay board (RS-422) IF 300C

PT 441 395-T Interface and relay board (Profibus) IF 300P

Tbl. 2: Variants

You can find the part number on the rating plate of the product.

Pfeiffer Vacuum reserves the right to make technical changes without prior notification.

The figures in this document are not to scale (dimensions in mm).

About this manual

7/48

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Abbreviations

Abbreviation Explanation

ASCII American Standard Code for Information Interchange

ATM Atmosphere

CNTR-P Repeater direction control signal (Profibus)

ESD Electrostatic Discharge

IF Interface

GND Ground

HV High vacuum

MHV Miniature High Voltage

(coax high voltage connector in miniature design)

NN Mean sea level

PE Penning

Profibus DP Profibus distributed periphery

About this manual

8/48

Abbreviation Explanation

RS-232 Recommended Standard 232

(Standard for a serial interface often available on computers)

RS-422 Recommended Standard 422

(Interface standard for a wired differential serial data transfer)

RxD Received eXchange Data (incoming data line)

SHV Safe High Voltage (connector for coax cable)

TPG Total Pressure Gauge (total pressure measuring and control unit)

TxD Transmitted eXchange Data (outgoing data line)

Tbl. 3: Abbreviations used

1.4 Trademark proof

●Profibus® is a registered trading name of Profibus Nutzerorganisation e.V.

About this manual

9/48

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

Safety instructions according to product’s life stages

All safety instructions in this document are based on the results of a risk assessment.

Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during installation

DANGER

Danger to life due to dangerous contact voltage

Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If

you come into contact with dangerous contact voltage, this can result in injury through electric shocks

or even death.

►Only connect the gauge to professionally grounded devices.

►Take additional safety measures on the system-side if processes in the vacuum system (e.g.

flashovers) can result in dangerous voltages at the gauge connections.

►Secure the line to the gauge.

Safety

10/48

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