Pfeiffer Vacuum RME 005 A Bedienungsanleitung

BP 5059 BEN (2011-10)

A PASSION FOR PERFECTION

RME 005 A

Control Valve

Operating Instructions

2BP 5059 BEN (2011-10)

Product Identification

In all communications with Pfeiffer Vacuum please specify the

information on the product nameplate. For convenient reference

copy that information into the space provided below:

Pfeiffer Vacuum, D-35614 Asslar

Typ:

Range:

No:

F-No:

V W

Validity

This document applies to products with part numbers

PF I13 936 (10 sccm)

PF I13 935 (50 sccm)

PF I13 934 (100 sccm)

PF I13 933 (500 sccm)

PF I13 932 (1000 sccm)

PF I13 931 (5000 sccm)

The part number (No) can be taken from the product nameplate.

We reserve the right to make technical changes without prior

notice.

All dimensions in mm.

Intended Use

The RME 005 A Control Valve is used in conjunction with the

RVC 300 Controller or another control device for controlling gas

flows and thus maintaining a desired pressure in a vacuum

system.

It must not be used for controlling liquid gases.

BP 5059 BEN (2011-10) 3

Functional Principle

The RME 005 A Control Valve opens and closes as a function of

the control voltage.

It will close or remain closed in the event of a power loss.

Example of a control loop:

RME 005 A

Control Valve

Controller

(e.g. RVC 300)

Vacuum pump

Pressure

sensor

Gas inlet Vacuum

system

Scope of Delivery

1× Control valve

1× Operating Instructions German

1× Operating Instructions English

1× Safety Guide

4BP 5059 BEN (2011-10)

Contents

Product Identification 2

Validity 2

Intended Use 2

Functional Principle 3

Scope of Delivery 3

1Safety 5

1.1 Symbols Used 5

1.2 Personnel Qualifications 5

1.3 General Safety Instructions 6

1.4 Liability and Warranty 6

2Technical Data 7

3Installation 10

3.1 Vacuum Connection 10

3.1.1 Flange Connections 11

3.1.2 Tube Connections 13

3.2 Power Connection 17

4Operation 17

5Deinstallation 18

6Maintenance / Repair 22

6.1 Replacing the Filter 22

7Accessories 25

8Returning the Product 26

9Disposal 27

For cross-references within this document, the symbol (→XY)

is used.

BP 5059 BEN (2011-10) 5

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and

environmental damage.

Caution

Information on correct handling or use. Disregard can lead to

malfunctions or minor equipment damage.

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by

persons who have suitable technical training and the

necessary experience or who have been instructed by the end-

user of the product.

6BP 5059 BEN (2011-10)

1.3 General Safety Instructions

•Adhere to the applicable regulations and take the necessary

precautions for the process media used.

Consider possible reactions between the materials and the

process media.

•Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the

safety instructions in this document.

•Before beginning to work, find out whether any vacuum

components are contaminated. Adhere to the relevant

regulations and take the necessary precautions when

handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

Pfeiffer Vacuum assumes no liability and the warranty becomes

null and void if the end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.)

on the product

•use the product with accessories not listed in the

corresponding product documentation.

The end-user assumes the responsibility in conjunction with the

process media used.

Failures due to contamination or wear and tear, as well as ex-

pendable parts (e.g. seals, filter), are not covered by the

warranty.

BP 5059 BEN (2011-10) 7

2 Technical Data

Vacuum connection M14×1

Adapters (accessories)

flange fitting

tube fitting

DN 10 ISO-KF

OD ¼", OD 6 mm

Installation angle any, preferably perpendicular

Pressure range 1×10-8 … 2 bar (absolute)

Tightness 1×10-9 mbar l/s

Gas flow 1)

PF I13 936

PF I13 935

PF I13 934

PF I13 933

PF I13 932

PF I13 931

10 sccm F.S.

50 sccm F.S.

100 sccm F.S.

500 sccm F.S.

1000 sccm F.S.

5000 sccm F.S.

Response time <30 ms

Supply voltage

Control range

Power

Duty cycle

0 … 24 VDC

20 … 70 mA, 1 … 100% F.S.

2.5 W

100%

Degree of protection IP51

Temperature

Ambiance

Bakeout

5 °C … 50 °C

80 °C (with idle coil)

Materials

Housing

Armature

Guiding tube

Springs

Seals

stainless steel 1.4301

stainless steel 1.4105 IL

stainless steel 1.4305, 1.4105 IL

stainless steel 1.4310

FPM

Weight 96 g

1) For air at a pressure difference Δp = 1 bar

8BP 5059 BEN (2011-10)

Dimensions [mm]

6.5

(17)

M14×1

2.8×0.5

14.5

OD 1/4"

14.5

OD 6 mm

DN 10 ISO-KF

AF 17

23.5

Electrical connection

Protective lid

BP 5059 BEN (2011-10) 9

Flow rate curve

Example of a flow rate curve (mean values 500 sccm F.S) at a

pressure difference Δp = 1 bar

Current (solenoid coil) [mA]

Gas flow [sccm]

Control valve closed

Control valve open

100

200

300

400

500

600

0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80

10 BP 5059 BEN (2011-10)

3 Installation

3.1 Vacuum Connection

Caution

Caution: vacuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent

damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean

tools when working in this area.

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