Zeiss 348247-9013-000 Bedienungsanleitung

Instruction Manual

Carl Zeiss Microscopy - Electron and Ion Beam Microscopy

Enabling the Nano-Age World®

105-mm DC stage

Optional Stage for Field Emission

Scanning Electron Microscopes

105-mm DC stage

Optional stage for Field Emission

Scanning Electron Microscopes

105-mm DC stage

Optional airlock for eld emission scanning electron microscopes

Original instructions

Carl Zeiss Microscopy GmbH

Carl-Zeiss-Promenade 10

07745 Jena, Germany

[email protected]

www.zeiss.com/microscopy

Carl Zeiss Microscopy GmbH

Carl-Zeiss-Straße 22

73447 Oberkochen, Germany

Document name: Instruction Manual 105-mm DC stage

Revision: en02

Effective from: June 2012

346000-8072-000

This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or

mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.

The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the

absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and therefore

free for general use.

Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent

upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured

to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-

up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make

modications of this document without notice.

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Table of Contents

1. About this manual ........................................................................................ 3

1.1. Definition of terms ........................................................................................... 4

2. Safety summary ........................................................................................... 5

2.1. Intended use ..................................................................................................... 5

2.2. Prevention of accidents and improper use ................................................... 5

2.3. Safety devices .................................................................................................. 7

2.3.1. Chamber door interlock ........................................................................................... 7

2.3.2. Touch alarm ............................................................................................................ 7

2.3.3. Stage safety function in SmartSEM®software ........................................................ 7

2.4. Safety labels ..................................................................................................... 8

3. Description ................................................................................................. 10

3.1. The 105-mm DC stage .................................................................................... 10

3.2. Principle of Operation .................................................................................... 11

3.3. Tool for specimen exchange ......................................................................... 13

3.4. Technical Data ................................................................................................ 14

3.5. Customer service ........................................................................................... 16

4. Installation .................................................................................................. 16

5. Operation .................................................................................................... 17

5.1. Preparing the specimen holder .................................................................... 18

5.2. Loading the specimen chamber via an airlock ........................................... 19

5.3. Loading the specimen chamber via open chamber door ........................... 19

5.4. Locating the specimen .................................................................................. 25

6. Maintenance and repair ............................................................................. 26

6.1. Cleaning the chamber door ........................................................................... 26

6.2. Troubleshooting ............................................................................................. 27

7. Deinstallation and disposal ....................................................................... 28

8. Index ............................................................................................................ 29

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1. About this manual

This instruction manual is considered to be part of the 105-mm DC stage.

Read the instructions carefully. Keep the instruction manual nearby the 105-mm DC stage and

hand it over to future owners of the instrument.

This instruction manual is designed for users who have been trained by an authorized Carl Zeiss

expert to operate the FESEM, the 105-mm DC stage is built in.

Operators of the 105-mm DC stage must not deviate from the instructions provided in this docu-

ment.

Safety

instructions The safety instructions in this manual are classified as follows:

CAUTION

This safety symbol and signal word indicates a potentially hazardous situation.

Disregarding this warning MAY result in minor or moderate injury.

CAUTION

This signal word used without a safety symbol indicates a potentially hazardous situation.

Disregarding this warning MAY result in property damage.

Moreover you will find the following type of information:

IMPORTANT

This symbol and signal word draws your attention to important and useful

information.

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Typographical

conventions For the description of software, the following typographical conventions are used:

1.1. Definition of terms

The following terms are used in this instruction manual:

Typography Meaning

Push <ENTER>. Push the ENTER key on the keyboard.

Type <key1, key2> Type key 1 first, then type key 2 on the keyboard.

Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL

key on the keyboard.

Click on the High voltage icon.

Select Aperture size from the drop-down list.

Icons, buttons and menus are printed in bold.

Select Aperture size 30 µm.

Set FIB Fil V Target to zero.

Values to be selected are printed in italics.

Text Meaning

Click... Press the left mouse button.

Right-click... Press the right mouse button.

Double-click.... Press the left mouse button twice.

FESEM Field emission scanning electron microscope

105-mm DC stage 6-axes, super eucentric stage driven by a DC (Direct Current) motor

SmartSEM®software Operating software for Carl Zeiss field emission scanning electron

microscopes

Carl Zeiss service engineer,

Carl Zeiss service staff Specially trained service expert, either Carl Zeiss staff or authorised

service partner of Carl Zeiss.

Operator Basic operator:

Person who has been trained to perform fundamental operation

sequences

Advanced operator:

Electrically skilled person who has been trained to perform basic main-

tenance tasks

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2. Safety summary

2.1. Intended use

The 105-mm DC (Direct Current) stage is an option for the following Carl Zeiss field emission

scanning electron microscopes:

The 105-mm DC stage is a 6-axes, super eucentric stage. It is used for precise positioning of

samples in the specimen chamber of an electron microscope. The sample weight must not ex-

ceed 500 g. The 105-mm DC stage can be controlled via dual joystick or SmartSEM®software.

Using the 105-mm DC stage for any other purpose is not allowed and could be hazardous.

2.2. Prevention of accidents and improper use

CAUTION

Risk of injury or damage due to improper operation of the 105-mm DC stage.

Read the user documentation carefully.

Do not operate the 105-mm DC stage until you have completely read and understood this

instruction manual.

CAUTION

There are moving parts at the specimen stage.

Loose clothes, jewellery or long hair can be caught in moving parts.

Wear suitable cloth and a protective hair covering when working at the specimen stage.

Option Part no. Compatible Carl Zeiss FESEM

105-mm DC stage 348247-9013-000 SUPRA®40/40VP

SUPRA®55/55VP

ULTRA 55,

ULTRA plus

1540 XB

1540EsB®

105-mm DC stage 349347-9013-000 NVision 40

NEON®40

NEON®40EsB®

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CAUTION

There are moving parts at the specimen stage.

Fingers could be trapped.

Do not touch the specimen stage when the specimen chamber is open.

CAUTION

The specimen might have a weight of 500g.

Risk of injury when specimen falls down.

Wear personal protective equipment, i.e. protective shoes.

CAUTION

Risk of property damage

FESEM or specimen could be damaged, if specimen stage is at short working distance

when opening the chamber door.

Always move the specimen stage to a large working distance before opening the chamber

door.

CAUTION

Opening the chamber door with stage tilted.

Detectors and the motor of the stage could be damaged.

Set the tilt angle of the stage to 0° before opening the chamber door.

CAUTION

Risk of property damage

FESEM or specimen could be damaged, if a detector is in the travel of the 105-mm DC

stage.

Retract the detectors before opening the chamber door.

CAUTION

Risk of property damage due to improper maintenance, service, or repair.

The warranty might be voided.

Follow the instructions given in this instruction manual.

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IMPORTANT

All pursuing tasks of maintenance, service, and repair not described in this instruction

manual have to be performed by authorised Carl Zeiss service staff only.

IMPORTANT

Fingerprints can cause virtual vacuum leaks.

Always wear lint-free gloves when touching the specimen or inner parts of the chamber.

2.3. Safety devices

In order to prevent any risk of hazard to human health or to property, the 105-mm DC stage is

equipped with several safety and protective devices.

2.3.1. Chamber door interlock

The chamber door interlock is located at the inner

bottom front side of the specimen chamber.

It ensures that the door of the specimen chamber

is closed properly.

When this interlock is activated (i.e. no electrical

contact) ’EHT Vac ready = no’ is indicated in the

SmartSEM®user interface.

EHT and SE2 detector voltages are blocked.

2.3.2. Touch alarm

To prevent damages caused by accidental touch of a conductive sample or the specimen holder

withparts ofthespecimenchamberorthe objective lens, there isa touch alarm.If the touchalarm

is triggered off, the stage stops and an on-screen message is shown.

2.3.3. Stage safety function in SmartSEM®software

When the chamber door is opened, the Z-, M-, and T-axis cannot be moved anymore.

The X-,Y-, and R-axis can only be moved with reduced velocity.

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2.4. Safety labels

Appropriate safety labels on the 105-mm DC stage warn users of possible hazards.

Each safety label is affixed to the point where a particular hazard exists.

Fig. 1.1: Safety labels at the chamber door

Position Subject Label

A Safety information

B Safety information

CType plate for SUPRA®

and ULTRA series

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