Pfeiffer Vacuum UDV 046 Bedienungsanleitung

BP 5279 BEN (2010-10)

A PASSION FOR PERFECTION

UDV 046

All-Metal Dosing Valve, manually actuated

Operating Instructions

2BP 5279 BEN (2010-10) UDV 046

In all communications with Pfeiffer Vacuum, please specify the information on the

product nameplate. For convenient reference copy that information into the space

provided below.

Typ:

No:

F-No:

Pfeiffer Vacuum, D-35614 Asslar

This document applies to products with part number PF I52 035.

The part number (No) can be taken from the nameplate.

We reserve the right to make technical change without prior notice.

All dimensions in mm.

The UDV 046 All-Metal Dosing Valve is used for admitting a precise and

reproducible gas flow into a vacuum system and is suited, for example, for

•gas and surface analysis

•mass spectrometry

•nuclear physics, accelerators

•cathode sputtering

•vacuum and laser technology

•handling of very pure gases

Product Identification

Validity

Intended Use

BP 5279 BEN (2010-10) UDV046.oi 3

Contents

Product Identification 2

Validity 2

Intended Use 2

1Safety 4

1.1 Symbols Used 4

1.2 Personnel Qualifications 4

1.3 General Safety Instructions 4

1.4 Liability and Warranty 4

2Technical Data 5

3Installation 6

3.1 Capillary for Precisely Routing the Gas Flow 6

3.2 Installation in the Vacuum System 7

4Operation 8

4.1 Setting the Gas Flow 8

4.2 Operation at Low Gas Flows 9

4.3 Compensation of Temperature Variations 9

4.4 Bakeout 9

5Deinstallation 10

5.1 Vacuum Connection 10

6Maintenance 11

6.1 Disassembling the Valve Mechanism 11

6.2 Cleaning the Valve Mechanism 14

6.3 Replacing the Cup Springs 14

6.4 Adjusting the Prestress of the Cup Springs 15

6.5 Assembling the Valve Mechanism 15

7Troubleshooting 18

7.1 Valve Is Not Tight 18

7.2 Adjusting the Tightness at the Valve Seat 18

7.3 Adjusting the Lever 21

7.4 Disassembling the Sealing Elements of the Valve Seat 24

7.5 Checking and Cleaning the Valve Body and the Sealing Elements of

the Valve Seat 26

7.6 Assembling the Sealing Elements of the Valve Seat 28

8Accessories 30

9Spare Parts 31

10 Returning the Product 32

11 Disposal 32

For cross-references within this document, the symbol (→XY) is used, for cross-

references to further documents the symbol (→[Z]).

4BP 5279 BEN (2010-10) UDV 046

1 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

•Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions between the materials (→5) and the process

media.

•Use protective gloves for actuating the valve at operating temperatures <55 °C

(→8).

•Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document

(→11, 18).

•Before beginning to work, find out whether any vacuum components are con-

taminated. Adhere to the relevant regulations and take the necessary precau-

tions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the

end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories, options, and add-ons not listed in the corre-

sponding product documentation.

The end-user assumes the responsibility in conjunction with the process media

used.

Failures due to contamination or wear and tear, as well as expendable parts (e.g.

seals), are not covered by the warranty.

1.1 Symbols Used

1.2 Personnel Qualifications

1.3 General Safety

Instructions

1.4 Liability and Warranty

BP 5279 BEN (2010-10) UDV046.oi 5

2 Technical Data

Actuation manual

Connections

Vacuum side

Inlet side

DN 40 CF-F

M5 (capillary)

DN 16 CF-R

Mounting orientation any

Tightness of closed valve <10-11 mbar

Pressure range <10-10 mbar … 30 bar (absolute)

Operating pressure (vacuum side) <10-10 mbar … 1.5 bar

Smallest adjustable gas flow

Air

Pure gases

<10-9 mbar l/s

<10-10 mbar l/s

Highest adjustable gas flow 1) 600 mbar l/s

Conductance of open valve 1) 0.7 l/s, molecular flow

Temperature

Operation

Bakeout

Storage

≤200 °C

≤350 °C

5 … 45 °C

Materials

Housing, diaphragm

Valve plate

Valve seat

stainless steel

sapphire

copper alloy

Weight 1.4 kg

1) At an inlet pressure of 1 bar

32.5

85.5

DN 40 CF-F

ø46

98.2

DN 16 CF-R

Recommended flow direction

Protective lid

Valve seat side

Dimensions [mm]

6BP 5279 BEN (2010-10) UDV 046

3 Installation

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the

desorption rate.

Always wear clean, lint-free gloves and use clean tools when working

in this area.

Heating jacket

(accessory)

DN 16 CF-F

ø18

Supplied

by end-user

Gas supply

Accessory

Flange with tube

Capillary

Do not turn

the knurled nut

ø2×0.5

1000

Overview

3.1 Capillary for Precisely

Routing the Gas Flow

BP 5279 BEN (2010-10) UDV046.oi 7

•Remove the protective lids and install the valve into the vacuum system.

•Ensure good accessibility of the knurled nut.

Do not turn the

knurled nut

Gasket (accessory)

Screws, M4×20 1)

(accessories)

Gasket (accessory)

Screws, M6×35 2)

(accessories)

Protective lid

DN 16 CF-F

DN 40 CF-F

Protective lid

1) required torque 4 Nm, thread lubricated

2) required torque 10 Nm, thread lubricated

Recommended flow direction

3.2 Installation in the

Vacuum System

8BP 5279 BEN (2010-10) UDV 046

4 Operation

°C

DANGER

DANGER: hot surface

Touching the hot surface can cause burns.

Wear protective gloves.

°C

55 °C

200 °C

°C

nOpen the valve by 3 counter clockwise turns of the knurled nut .

3 turns

Locked

oSet the desired gas flow with the knurled nut.

Locked

4.1 Setting the Gas Flow

BP 5279 BEN (2010-10) UDV046.oi 9

When operating the valve at gas flows ≤10-9 mbar l/s, the orifice can be contami-

nated by condensable vapors. Adsorbed vapors can be removed by baking the

valve in open position (at approx. 200 °C for 30 minutes). Such adsorption can be

prevented by heating the valve during operation, for example with a heating jacket

(→30).

At gas flows <3×10-10 mbar l/s, in addition to heating, make sure the admitted gas

is free of condensable vapors. If necessary, the gas can be admitted via a drying

device (e.g. liquid nitrogen cold trap).

Rapid changes in the environment such as draughts of air and sun irradiation can

influence the gas flow too strongly for certain experiments. To avoid this, operate

the valve at a controlled temperature ≤200 °C using, for example, a heating jacket

(→30) in conjunction with a thermocouple.

Oxidation occurs (interfering on sealing surfaces) when the valve is baked at

atmospheric pressure at temperatures above 300 ºC. This can be avoided, for

example, by using a protective gas atmosphere or an auxiliary vacuum.

Caution

Consider the information on lubricating the valve (→11).

4.2 Operation at Low Gas

Flows

4.3 Compensation of Tem-

perature Variations

4.4 Bakeout

10 BP 5279 BEN (2010-10) UDV 046

5 Deinstallation

The vacuum system must be vented, the gas inlet closed and the valve

cooled down to <55 °C.

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contami-

nated. Adhere to the relevant regulations and take the necessary

precautions when handling contaminated parts.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the

desorption rate.

Always wear clean, lint-free gloves and use clean tools when working

in this area.

Detach the flanges and put the protective lids in place.

Gasket

Protective lid Protective lid

Use new gaskets when reinstalling the valve (→30).

5.1 Vacuum Connection

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